EUV Lithography 14nm wavelength
EUV lithography is the next generation of patterning. ASML EUV is in the forefront of the tool technology with first ASML Alpha Demo Tool (ADT) and first production tool ASML EUV NXE3300. We at photolithography.net have worked with EUV for the past 4 years. Let us help you with your EUV lithography.
Recently Polymer bound PAG’s are coming into widespread use among euv resist vendors. This is to control the diffusion length of the primary through quaternary electrons after absorbing a photon.